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Semiconductor Wafer Laser Dicing & Drilling

Publish Time: Jul. 09, 2026

【Description】:

Boost die yield with Chanxan high-precision wafer laser dicing solutions. Zero-chipping cutting, grooving & micro-drilling for silicon, SiC, GaN & glass wafers.

Semiconductor Wafer Laser Dicing | Chanxan Laser Solutions for Precision Wafer Processing
Low Chipping, High-Yield Dicing

Semiconductor Wafer Laser Dicing System

Silicon, SiC, GaN, glass and compound semiconductor wafers carry increasingly dense, increasingly thin die — and every micron of chipping or heat-affected zone at the street eats directly into device yield.

Silicon Wafer SiC Wafer GaN Wafer Glass Wafer Compound Semiconductor Wafer
Chanxan Laser Semiconductor Wafer Dicing Process Visual
Processing Challenges

Why Wafer Dicing Needs a Dedicated Laser Process

Die-level chipping tolerance

Mechanical saw dicing generates edge chipping that directly reduces die strength and shrinks usable die area as device geometries continue to shrink.

Increasingly thin wafers

Thinned wafers for advanced packaging flex and crack under saw-induced mechanical stress, making non-contact separation increasingly necessary at scale.

Hard, brittle substrates

SiC and GaN wafers are harder and more brittle than silicon, wearing down saw blades quickly and driving up consumable cost and downtime.

Street width and die density

Narrower dicing streets on modern layouts leave less margin for kerf width and heat-affected zone, raising the bar for cut precision.

Laser Processing Wafers
CHANXAN SOLUTION

Recommended Process Sequence

Chanxan Laser Semiconductor Dicing Street Path Simulation
  • Wafer Dicing

    Full-thickness ablation dicing separates die along the street with narrow kerf width and minimal chipping at the top and bottom surface.

  • Grooving

    Shallow grooves cut through passivation and metal layers ahead of mechanical or stealth separation, protecting the underlying die from chipping.

  • Micro Drilling

    Fine through-silicon vias and alignment features are formed with controlled hole taper for advanced packaging and MEMS structures.

  • Thin Wafer Cutting

    Sub-100 micron wafers used in advanced packaging are cut without the mechanical load that would otherwise crack or warp the thinned substrate.

Processing Quality

Application Samples Showcase

Microscopic processing results showing narrow kerf, zero chipping, and consistent die separation.

Dicing Street Cross-Section (Microscope 200x) - Chip-Free Silicon Dicing
Chip-Free Silicon Dicing
SiC Stealth Dicing
SiC Wafer Dicing
Glass Wafer Drilling
Glass Wafer Drilling
Applications

Where this is used

These are the industry segments where Chanxan laser systems are deployed for semiconductor wafer processing.

Semiconductor Chips Power Devices MEMS Devices Advanced Packaging Microelectronics

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